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| TAIYO NIPPON SANSO Corporation, Tsukuba Laboratory
TAIYO NIPPON SANSO Tsukuba Laboratory Overview At the Tsukuba Laboratory, the main focus of research
and development are the both researches of basic technology and new product
development on the gas and equipment for the fields of electronics. Examples
of R&D themes related to the electronics materials and equipment
include those such as the ultra-clean technology and micro gas analysis
for the highly purified gas supply, and the development of the compound
semi-conductor manufacturing devices. The laboratory is equipped with
the class 100 clean room and the state-of-the-art MOCVD systems and the
researchers are actively interacting with the other R&D laboratories
and the national institutions around Tsukuba area, like conducting the
joint research. Especially the development of GaN-MOCVD system that produces
the materials for the recent hot-topic blue LED is attracting a lot of
attention. Tsukuba laboratory is used not only for the research and development
purpose, but also for other purposes that fulfill the main needs of TAIYO NIPPON SANSO's Electronics Department. Such as the gas laboratory for the quality-control
analysis, and is expected to expand the capability to develop the breakthrough
innovations that drive the future growth in the rapid growing market. TAIYO NIPPON SANSO Corporation
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![]() GaN-MOVPE SR-23K 2"x10 for production |
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![]() GaN-MOVPE SR-6000: 2"x6 for production |
![]() GaN-MOVPE SR-6000: Reactor inside Globe box |
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![]() Electro-luminescence from GaN-MQW |
![]() MOVPE PR-23000 (6"x5): III-V device production |
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![]() X-ray diffraction system: X' PERT-MRD |
![]() Photo-luminescence mapper: PLM-150 |
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![]() AFM: SPI-3800 |
![]() Field-emission scanning electron microscope (FE-SEM): S-4700 |
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![]() Contactless Measurement System LEHIGHTON |
![]() Hall measuring device: HL5500PC |
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![]() Photo-luminescence mapping system: RPM Sigma S |
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Toyo Bldg., 1-3-26 Koyama, Shinagawa-ku, Tokyo 142-8558, Japan Tel: +81-3-5788-8460 Fax: +81-3-5788-8712 Copyright © 2004 by TAIYO NIPPON SANSO Corporation. All rights reserved. E-mail: info@mocvd.jp |