Tsukuba

TAIYO NIPPON SANSO Corporation, Tsukuba Laboratory

TAIYO NIPPON SANSO Tsukuba Laboratory Overview

At the Tsukuba Laboratory, the main focus of research and development are the both researches of basic technology and new product development on the gas and equipment for the fields of electronics. Examples of R&D themes related to the electronics materials and equipment include those such as the ultra-clean technology and micro gas analysis for the highly purified gas supply, and the development of the compound semi-conductor manufacturing devices. The laboratory is equipped with the class 100 clean room and the state-of-the-art MOCVD systems and the researchers are actively interacting with the other R&D laboratories and the national institutions around Tsukuba area, like conducting the joint research. Especially the development of GaN-MOCVD system that produces the materials for the recent hot-topic blue LED is attracting a lot of attention. Tsukuba laboratory is used not only for the research and development purpose, but also for other purposes that fulfill the main needs of TAIYO NIPPON SANSO's Electronics Department. Such as the gas laboratory for the quality-control analysis, and is expected to expand the capability to develop the breakthrough innovations that drive the future growth in the rapid growing market.

Established: July 1992
Location: 10 Okubo, Tsukuba-shi, Ibaraki-pref.
Area: 38,311m2

TAIYO NIPPON SANSO Corporation
Tsukuba Laboratory
10 Okubo, Tsukuba-shi, Ibaraki-pref. 300-2611
Inside Techno Park Oho
TEL: +81-298-65-2711



GaN-MOVPE SR-23K
2"x10 for production
   

GaN-MOVPE SR-6000:
2"x6 for production
 
GaN-MOVPE SR-6000:
Reactor inside Globe box

Electro-luminescence from GaN-MQW
  MOVPE PR-23000(6"x5)
MOVPE PR-23000 (6"x5):
III-V device production

X-ray diffraction system:
X' PERT-MRD
 
Photo-luminescence mapper:
PLM-150

AFM:
SPI-3800
  S-4700
Field-emission scanning electron microscope
(FE-SEM): S-4700

Contactless Measurement System LEHIGHTON
  HL5500PC
Hall measuring device:
HL5500PC
RPM Sigma S
Photo-luminescence mapping system:
RPM Sigma S
   


Toyo Bldg., 1-3-26 Koyama, Shinagawa-ku, Tokyo 142-8558, Japan
Tel: +81-3-5788-8460 Fax: +81-3-5788-8712
Copyright © 2004 by TAIYO NIPPON SANSO Corporation. All rights reserved.
E-mail: info@mocvd.jp