GaAs/InP MOCVD

High-speed communication device, a basis of the Mobile communications network, nad LD for Blue-Ray are all within the field of compound semiconductor. Taiyo Nippon Sanso's MOCVD equipment has been in this field since the dawn of compound semiconductor history and have been highly-valued ever since.

VR series

GaAs/InP Reserch and Development

Model Type Wafer face Wafer Material
Reactor Transfer tray
VR-3000 3" vertical rotary susceptor Face up 2" x 1 or 3" x 1 Quartz Quartz

HR series

GaAs/InP Reserch and Development - Production

Model Type Wafer face Wafer Material
Reactor Transfer tray
HR-3000 3" horizontal rotary susceptor Face up 2" x 1 or 3" x 1 Quartz Quartz
HR-4000 4" horizontal rotary susceptor Face up 2" x 3 or 4" x 1 Quartz Quartz
HR-6000 8" horizontal rotary susceptor Face down 2" x 7 Stainless steel Carbon
HR-8000 3" vertical rotary susceptor Face down 2" x 11 or 3" x 6 or 4" x 3 or 8" x 1 Stainless steel Carbon
HR-10000 3" vertical rotary susceptor Face down 2" x 19 or 3" x 9 or 6" x 3 Stainless steel Carbon

BRC・BMC series

BRC series: GaAs/InP Reserch and Development
BMC series: GaAs/InP Mass Production

Model Type Wafer face Wafer size Application
Reactor
BRC Horizontal Face down 1"～4"x1 /2"x3 wafers Research
BMC Rotation & Revolution Face down 2"x42～6"x6 wafers Product
  • BMC Reactor Concept
    (BMC Rotation & Revolution, Face Down)