GaAs/InP MOCVD

High-speed communication device, a basis of the Mobile communications network, nad LD for Blue-Ray are all within the field of compound semiconductor. Taiyo Nippon Sanso's MOCVD equipment has been in this field since the dawn of compound semiconductor history and have been highly-valued ever since.

BRC・BMC series

BRC series: GaAs/InP Reserch and Development
BMC series: GaAs/InP Mass Production

Model Type Wafer face Wafer size Application
Reactor
BRC Horizontal Face down 1"～4"x1 /2"x3 wafers Research
BMC Rotation & Revolution Face down 2"x42～6"x6 wafers Product
  • BMC Reactor Concept
    (BMC Rotation & Revolution, Face Down)