Related Equipment

Taiyo Nippon Sanso is an industrial gas professional.
Total-solution of necessary surrounding equipment and facilities for compound semiconductor manufacturing including gas supply systems and gas abatement systems possible.

For Bulk Gas Supply (1t for super-NH3)

Gas Purifier System (for NH3, N2, H2)

Hercules Burner

Electronics Specialty Gases

Providing semiconductor gases depending on customer's various needs with stable quality and safety.

Cylinder Cabinet

Providing Cylinder Cabinets fully complied to the High Pressure Gas Safety Act (Japan).


Providing various types of purifiers including normal temperature adsorption-type, low temperature adsorption-type, and Getter-type.

Abatement System

Providing gas abatement system (exhaust system) which detoxifies semiconductor material gas with safety and assurance.