GaN MOCVD

With a complete line-up including compact-size R&D reactor to world-class mass-production reactor, Taiyo Nippon Sanso contributes to the GaN compound semiconductor R&D and production.

SR series

GaN Reserch and Development - Production

Model Type Wafer Material
Reactor Transfer tray
SR-2000 2" horizontal rotary susceptor 2" x 1 Stainless Steel Quartz
SR-4000 4" horizontal rotary susceptor 2" x 3 or 4" x 1 Stainless Steel Quartz
SR-6000 6" horizontal rotary susceptor 2" x 6 or 3" x 3 or 6" x 1 Stainless Steel

UR series

GaN Mass Production

Model Type Wafer Material
Reactor Transfer tray
UR-25K Rotation & revolution susceptor 4"x 10 or 6"x 6 Stainless steel
UR-26K Rotation & revolution susceptor 8"x 6 or 6"x10 Stainless steel


UR-26K 8"x6 or 6"x10


UR-26K reactor