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With a complete line-up including compact-size R&D reactor to world-class mass-production reactor, Taiyo Nippon Sanso contributes to the GaN compound semiconductor R&D and production.
SR series
GaN Reserch and Development - Production
| Model | Type | Wafer | Material | |
|---|---|---|---|---|
| Reactor | Transfer tray | |||
| SR-2000 | 2" horizontal rotary susceptor | 2" x 1 | Stainless Steel | Quartz |
| SR-4000 | 4" horizontal rotary susceptor | 2" x 3 or 4" x 1 | Stainless Steel | Quartz |
| SR-6000 | 6" horizontal rotary susceptor | 2" x 6 or 3" x 3 or 6" x 1 | Stainless Steel | — |
UR series
GaN Mass Production
| Model | Type | Wafer | Material | |
|---|---|---|---|---|
| Reactor | Transfer tray | |||
| UR-25K | Rotation & revolution susceptor | 4"x 10 or 6"x 6 | Stainless steel | — |
| UR-26K | Rotation & revolution susceptor | 8"x 6 or 6"x10 | Stainless steel | — |

UR-26K 8"x6 or 6"x10

UR-26K reactor
