World-Class MOCVD

Taiyo Nippon Sanso contributes to the sustainable society with a low-power consumption key-device manufacturing MOCVD equipment.


GaN compound semiconductor R&D/ mass-production MOCVD equipment for expanding demand in solid-state-lighting LED and power semiconductors.

World's Finest MOCVD

Taiyo Nippon Sanso's MOCVD equipment developed based on the company's gas-handling technologies and ultra-high vacuum technologies proven over the years are highly-rated by our customers world-wide. Taiyo Nippon Sanso will respond with its original technology and contribute to an establishment of energy-conserving and low-carbon society.

Developed from Semiconductor Laser

GaN MOCVD System UR-26K 8"x6 or 6"x10"

Compound semiconductors are said to be distinguished as a light-emitting device, being predisposed to emitting light easier than Silicon. Laser dioes (LD) take advantage of this charactersitc. GaAs based LD were put into practical use in 1979 in the U.S., and was officially accepted as a light-source for CDs in 1981. The manufacturing process used for this was MOCVD epitaxial growth. In other words, compound semiconductor's practical use was enabled with the development of MOCVD equipment. Nowadays, the demand has expanded to Blu-ray and optical communication.

What followed after LD was light-emitting-diodes (LED). The development of low-power consumption and high luminance LED helped expand the possibility of displays. Especially with the development of GaN-based blue and green LED in Japan, leading to the three-color-attribute (Red, Green, Blue), developed into large-screen displays. Currently, blue LED + flourescent method-based white general lighting, flat-screen television's liquid crystal backlight is expanding its market. The ultra-violet LED (UV-LED) lamps are also expanding its market field. Also, compound semiconductor's characteristic of high efficiency and high speed is advantageous for not only light-emitting devices but also for electronic devices including communication device power amps and power supply controls.

Background of Rapid Development of Compound Semiconductor

Flat-screen television and smart phones replacing CRT-television and cellular phones. Solid-state lighting spreading gradually but surely in the market. And power semiconductors, a key-player in energy conservation. These advanced applications' demand is expanding compound semiconductor market including LD, LED, and electronic device (HEMT). Together with this market expansion, Taiyo Nippon Sanso's MOCVD equipment with world's leading technology is in the limelight.

Taiyo Nippon Sanso MOCVD

The realization of the balance between high-quality and high-productivity compound semiconductor is demanded for UV-LED and next-generation power semiconductor producing MOCVD. Taiyo Nippon Sanso MOCVD is able to provide to customers; original process and wide-window as well as high-reliability hardware which can produce high-quality compound semiconductors.

  • Taiyo Nippon Sanso MOCVD Characteristics
    • Provide total solution including material gases to gas abatement systems.
    • Provide process development and epi-samples by company-owned MOCVD equipment.
    • Optimize reactor gas-flow with visualization experiments and computer simulation.
    • Provide flexible service for variety of customer requests including system configuration and heating system.
    • Minimize down-time with maintenance-emphasized reactor design.